Invention Grant
US09536701B2 Radiation analyzer including a support for tilting an energy-dispersive radiation detector 有权
辐射分析仪,包括用于倾斜能量色散辐射探测器的支架

  • Patent Title: Radiation analyzer including a support for tilting an energy-dispersive radiation detector
  • Patent Title (中): 辐射分析仪,包括用于倾斜能量色散辐射探测器的支架
  • Application No.: US14799856
    Application Date: 2015-07-15
  • Publication No.: US09536701B2
    Publication Date: 2017-01-03
  • Inventor: Yorinobu Iwasawa
  • Applicant: JEOL Ltd.
  • Applicant Address: JP Tokyo
  • Assignee: JEOL Ltd.
  • Current Assignee: JEOL Ltd.
  • Current Assignee Address: JP Tokyo
  • Agency: The Webb Law Firm
  • Priority: JP2014-146829 20140717
  • Main IPC: G01F23/00
  • IPC: G01F23/00 H01J37/244 H01J37/22 H01J37/28
Radiation analyzer including a support for tilting an energy-dispersive radiation detector
Abstract:
A radiation analyzer includes a primary ray source that generates primary rays, an optical system applies the primary rays emitted from the primary ray source to a sample, an energy-dispersive radiation detector that detects radiation that has been generated from the sample when the primary rays have been applied to the sample, and a support that supports the radiation detector so that the tilt of the center axis (C) of the radiation detector with respect to the optical axis (Z) of the optical system can be changed.
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