Invention Grant
US09536840B2 Three-dimensional (3-D) integrated circuits (3DICS) with graphene shield, and related components and methods
有权
具有石墨烯屏蔽的三维(3-D)集成电路(3DICS)及相关组件和方法
- Patent Title: Three-dimensional (3-D) integrated circuits (3DICS) with graphene shield, and related components and methods
- Patent Title (中): 具有石墨烯屏蔽的三维(3-D)集成电路(3DICS)及相关组件和方法
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Application No.: US13765061Application Date: 2013-02-12
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Publication No.: US09536840B2Publication Date: 2017-01-03
- Inventor: Yang Du
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Agency: Withrow + Terrnova, PLLC
- Main IPC: H01L23/552
- IPC: H01L23/552 ; H01L23/373 ; H01L27/06 ; H01L23/522 ; H01L25/065 ; H01L25/00

Abstract:
A three-dimensional (3-D) integrated circuit (3DIC) with a graphene shield is disclosed. In certain embodiments, at least a graphene layer is positioned between two adjacent tiers of the 3DIC. A graphene layer is a sheet like layer made of pure carbon, at least one atom thick with atoms arranged in a regular hexagonal pattern. A graphene layer may be disposed between any number of adjacent tiers in the 3DIC. In exemplary embodiments, the graphene layer provides an electromagnetic interference shield between adjacent tiers or layers in the 3DIC to reduce crosstalk between the tiers. In other exemplary embodiments, the graphene layer(s) can be disposed in the 3DIC to provide a heat sink that directs and dissipates heat to peripheral areas of the 3DIC. In some embodiments, the graphene layer(s) are configured to provide both EMI shielding and heat shielding.
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