发明授权
- 专利标题: Coating method and coating apparatus
- 专利标题(中): 涂布方法和涂布装置
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申请号: US13394271申请日: 2010-09-06
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公开(公告)号: US09539615B2公开(公告)日: 2017-01-10
- 发明人: Edward Willem Albert Young , Erik Dekempeneer , Antonius Maria Bernardus van Mol , Herbert Lifka , Peter van de Weijer , Bernhard Sailer , Emilie Galand , Richard Frantz , Dimiter Lubomirov Kotzev , Mohammed Zoubair Cherkaoui
- 申请人: Edward Willem Albert Young , Erik Dekempeneer , Antonius Maria Bernardus van Mol , Herbert Lifka , Peter van de Weijer , Bernhard Sailer , Emilie Galand , Richard Frantz , Dimiter Lubomirov Kotzev , Mohammed Zoubair Cherkaoui
- 申请人地址: NL Delft CH Basel
- 专利权人: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO,Huntsman Advanced Materials (Switzerland) GmbH
- 当前专利权人: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO,Huntsman Advanced Materials (Switzerland) GmbH
- 当前专利权人地址: NL Delft CH Basel
- 代理机构: Swanson & Bratschun, L.L.C.
- 优先权: EP09169668 20090907
- 国际申请: PCT/NL2010/050560 WO 20100906
- 国际公布: WO2011/028119 WO 20110310
- 主分类号: C23C16/44
- IPC分类号: C23C16/44 ; B05D7/04 ; B05C9/06 ; C23C14/56 ; C23C16/34 ; C23C16/54 ; H01J37/18 ; H01J37/32 ; B05D3/04
摘要:
An apparatus is described for coating a flexible substrate with at least a first organic layer and a first inorganic layer. The apparatus comprises a first and a second chamber and an atmosphere decoupling slot between the first and the second chamber. A printing facility is arranged in the first chamber, for printing the flexible substrate with a mixture comprising at least one precursor for a polymer, oligomer or a polymer network and a polymerization initiator. A curing facility is arranged in the first chamber, for curing the deposited mixture, therewith forming the at least first organic layer. A vapor deposition facility is arranged in the second chamber, for depositing the at least first inorganic layer at the substrate provided with the at least first organic layer. The apparatus comprises a facility for guiding the flexible substrate along the printing facility, along the curing facility and via the atmosphere decoupling slot along the vapor deposition facility.
公开/授权文献
- US20120276299A1 Coating Method and Coating Apparatus 公开/授权日:2012-11-01
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