Invention Grant
- Patent Title: Chromatic confocal sensor and measurement method
- Patent Title (中): 色共聚焦传感器和测量方法
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Application No.: US15054722Application Date: 2016-02-26
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Publication No.: US09541376B2Publication Date: 2017-01-10
- Inventor: Koji Kubo
- Applicant: Mitutoyo Corporation
- Applicant Address: JP Kawasaki-Shi
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2015-039996 20150302; JP2016-035124 20160226
- Main IPC: G01J3/28
- IPC: G01J3/28 ; G01B11/02 ; G02B21/00

Abstract:
Provided is a chromatic confocal sensor including: a light source section that emits a plurality of light beams having different wavelengths; an optical head that includes an objective lens that converges the plurality of light beams at different focal positions and selects, as measurement light, light reflected by an object to be measured at the focal position out of the plurality of light beams; a spectroscope including diffraction gratings that split the selected measurement light into a plurality of diffracted light beams and a sensor that receives two or more of the plurality of diffracted light beams; and a signal processing/control section that calculates a position of the object to be measured based on a difference between light reception positions of the two or more diffracted light beams received by the sensor.
Public/Granted literature
- US20160258742A1 CHROMATIC CONFOCAL SENSOR AND MEASUREMENT METHOD Public/Granted day:2016-09-08
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