Invention Grant
US09543143B2 Method for producing amorphous oxide thin film and thin film transistor
有权
制造无定形氧化物薄膜和薄膜晶体管的方法
- Patent Title: Method for producing amorphous oxide thin film and thin film transistor
- Patent Title (中): 制造无定形氧化物薄膜和薄膜晶体管的方法
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Application No.: US14104714Application Date: 2013-12-12
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Publication No.: US09543143B2Publication Date: 2017-01-10
- Inventor: Kenichi Umeda , Atsushi Tanaka , Masayuki Suzuki , Tatsuya Shimoda
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2011-132303 20110614; JP2012-011270 20120123
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L21/02 ; H01L21/66 ; H01L27/146

Abstract:
A method for producing an amorphous oxide thin film includes: a pre-treatment process of selectively changing a binding state of an organic component, at a temperature lower than a pyrolysis temperature of the organic component, in a first oxide precursor film containing the organic component and In, to obtain a second oxide precursor film in which, when an infrared wave number range of from 1380 cm−1 to 1520 cm−1 in an infrared absorption spectrum obtained by performing a measurement by Fourier transform infrared spectroscopy is divided into an infrared wave number range of from 1380 cm−1 to 1450 cm−1 and an infrared wave number range of from more than 1450 cm−1 to 1520 cm−1, a peak positioned within the infrared wave number range of from 1380 cm−1 to 1450 cm−1 exhibits the maximum value in the infrared absorption spectrum within an infrared wave number range of from 1350 cm−1 to 1750 cm−1; and a post-treatment process of removing the organic component remaining in the second oxide precursor film, to transform the second oxide precursor film into an amorphous oxide thin film containing In.
Public/Granted literature
- US20140103341A1 METHOD FOR PRODUCING AMORPHOUS OXIDE THIN FILM AND THIN FILM TRANSISTOR Public/Granted day:2014-04-17
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