发明授权
- 专利标题: Semiconductor memory device and method of fabricating the same
- 专利标题(中): 半导体存储器件及其制造方法
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申请号: US14668938申请日: 2015-03-25
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公开(公告)号: US09543316B2公开(公告)日: 2017-01-10
- 发明人: Hyunmin Lee , Changseok Kang , Jongwon Kim , Hyeong Park
- 申请人: Hyunmin Lee , Changseok Kang , Jongwon Kim , Hyeong Park
- 申请人地址: KR
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR
- 代理机构: Renaissance IP Law Group LLP
- 优先权: KR10-2014-0101761 20140807
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L23/535
摘要:
Inventive concepts provide semiconductor memory devices and methods of fabricating the same. A stack structure and vertical channel structures are provided on a substrate. The stack structure includes insulating layers and gate electrodes alternately and repeatedly stacked on the substrate. The vertical channel structures penetrate the stack structure. Conductive pads are disposed on the vertical channel structures. An etch stopper covers sidewalls of the conductive pads. Pad contacts are disposed on the conductive pads to be in contact with the conductive pads. The pad contacts are further in contact with the etch stopper.
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