Invention Grant
- Patent Title: Array substrate, method for manufacturing the same, and display device
- Patent Title (中): 阵列基板,其制造方法以及显示装置
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Application No.: US14241345Application Date: 2013-11-08
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Publication No.: US09543338B2Publication Date: 2017-01-10
- Inventor: Xiang Liu , Gang Wang , Jianshe Xue
- Applicant: BOE Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE Technology Group Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: Frommer Lawrence & Haug LLP
- Priority: CN201310222271 20130605
- International Application: PCT/CN2013/086741 WO 20131108
- International Announcement: WO2014/194605 WO 20141211
- Main IPC: H01L21/84
- IPC: H01L21/84 ; H01L27/12 ; H01L29/423 ; H01L29/49 ; H01L29/66 ; G02F1/1343 ; G02F1/1362 ; H01L21/027 ; H01L21/4763 ; H01L29/45 ; H01L29/786

Abstract:
The present invention provides a method for manufacturing an array substrate comprising: sequentially forming an adhesion enhancement layer, a copper-bearing metal layer and a photoresist layer on a substrate, and respectively forming a reserved region and a removal region by performing exposure and development on the photoresist layer using a mask plate, simultaneously processing the adhesion enhancement layer, the copper-bearing metal layer and the photoresist layer in the removal region by a single wet etching process, to form an adhesion enhancement intermediate layer corresponding to the adhesion enhancement layer, a copper-bearing metal intermediate layer corresponding to the copper-bearing metal layer and the photoresist layer thereon in the reserved region; simultaneously processing the adhesion enhancement intermediate layer, the copper-bearing metal intermediate layer and the photoresist layer by a dry etching process, then stripping off the photoresist layer, to form a patterned adhesion enhancement layer and a patterned copper-bearing metal layer respectively.
Public/Granted literature
- US20160254296A1 Array Substrate, Method for Manufacturing the Same, and Display Device Public/Granted day:2016-09-01
Information query
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