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US09543352B2 CMOS image sensor with embedded micro-lenses 有权
具有嵌入式微透镜的CMOS图像传感器

CMOS image sensor with embedded micro-lenses
Abstract:
A backside illuminated CMOS image sensor and a manufacturing method thereof are provided. Embedded micro-lenses disposed respectively on concave surfaces of a buffer oxide layer, wherein the concave surfaces are positioned to respectively align with photodiodes of pixel array of the CMOS image sensor. The embedded micro-lenses can confine incident light to the photodiodes to reduce optical crosstalk between adjacent pixels.
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