Invention Grant
- Patent Title: CMOS image sensor with embedded micro-lenses
- Patent Title (中): 具有嵌入式微透镜的CMOS图像传感器
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Application No.: US14105063Application Date: 2013-12-12
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Publication No.: US09543352B2Publication Date: 2017-01-10
- Inventor: Volume Chien , Zen-Fong Huang , Chia-Yu Wei , Chi-Cherng Jeng , Hsin-Chi Chen
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McDermott Will & Emery LLP
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A backside illuminated CMOS image sensor and a manufacturing method thereof are provided. Embedded micro-lenses disposed respectively on concave surfaces of a buffer oxide layer, wherein the concave surfaces are positioned to respectively align with photodiodes of pixel array of the CMOS image sensor. The embedded micro-lenses can confine incident light to the photodiodes to reduce optical crosstalk between adjacent pixels.
Public/Granted literature
- US20150171136A1 CMOS IMAGE SENSOR WITH EMBEDDED MICRO-LENSES Public/Granted day:2015-06-18
Information query
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