Invention Grant
- Patent Title: Mirror micromechanical structure and related manufacturing process
- Patent Title (中): 镜面微机械结构及相关制造工艺
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Application No.: US14151471Application Date: 2014-01-09
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Publication No.: US09544573B2Publication Date: 2017-01-10
- Inventor: Roberto Carminati , Sebastiano Conti , Sonia Costantini
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Gardere Wynne Sewell, LLP
- Priority: ITTO2013A0031 20130114
- Main IPC: G02B26/08
- IPC: G02B26/08 ; H04N13/02 ; G01B11/25 ; G02B26/10 ; H04N5/225
Abstract:
A mirror micromechanical structure has a mobile mass carrying a mirror element. The mass is drivable in rotation for reflecting an incident light beam with a desired angular range. The mobile mass is suspended above a cavity obtained in a supporting body. The cavity is shaped so that the supporting body does not hinder the reflected light beam within the desired angular range. In particular, the cavity extends as far as a first side edge wall of the supporting body of the mirror micromechanical structure. The cavity is open towards, and in communication with, the outside of the mirror micromechanical structure at the first side edge wall.
Public/Granted literature
- US20140198366A1 MIRROR MICROMECHANICAL STRUCTURE AND RELATED MANUFACTURING PROCESS Public/Granted day:2014-07-17
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