Invention Grant
- Patent Title: Apparatus and system for generating extreme ultraviolet light and method of using the same
- Patent Title (中): 用于产生极紫外光的装置和系统及其使用方法
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Application No.: US14803920Application Date: 2015-07-20
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Publication No.: US09544985B2Publication Date: 2017-01-10
- Inventor: Jin-Seok Heo , Jin-Hong Park
- Applicant: Jin-Seok Heo , Jin-Hong Park
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel & Sibley, PA
- Priority: KR10-2014-0161941 20141119
- Main IPC: A61N5/06
- IPC: A61N5/06 ; H05G2/00 ; G21K1/06 ; G03F7/20 ; B05B12/12
Abstract:
Provided is an apparatus for generating extreme ultraviolet light. The apparatus includes a collector mirror unit, a gas supply unit configured to supply a processing gas to the collector mirror unit, a gas supply nozzle arranged in at least one area of the collector mirror unit and configured to supply the processing gas to a surface of the collector mirror unit, and a controller configured to adjust a shape of a spray hole of the gas supply nozzle. The shape of the spray hole may be changed according to a control operation of the controller.
Public/Granted literature
- US20160143122A1 Apparatus and System for Generating Extreme Ultraviolet Light and Method of Using the Same Public/Granted day:2016-05-19
Information query
