发明授权
US09548266B2 Semiconductor package with embedded capacitor and methods of manufacturing same
有权
具有嵌入式电容器的半导体封装及其制造方法相同
- 专利标题: Semiconductor package with embedded capacitor and methods of manufacturing same
- 专利标题(中): 具有嵌入式电容器的半导体封装及其制造方法相同
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申请号: US14469645申请日: 2014-08-27
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公开(公告)号: US09548266B2公开(公告)日: 2017-01-17
- 发明人: Sergio A. Ajuria , Phuc M. Nyugen , Douglas M. Reber
- 申请人: Sergio A. Ajuria , Phuc M. Nyugen , Douglas M. Reber
- 申请人地址: US TX Austin
- 专利权人: NXP USA, INC.
- 当前专利权人: NXP USA, INC.
- 当前专利权人地址: US TX Austin
- 主分类号: H01L23/522
- IPC分类号: H01L23/522 ; H01L49/02
摘要:
A semiconductor package with an embedded capacitor and corresponding manufacturing methods are described. The semiconductor package with the embedded capacitor includes a semiconductor die having a first metal layer extending across at least a portion of a first side of the semiconductor die and a package structure formed on the first side of the semiconductor die. A first electrical conductor of the embedded capacitor is formed in the first metal layer of the semiconductor die. The package structure includes a second metal layer that has formed therein a second electrical conductor of the embedded capacitor. A dielectric of the embedded capacitor is positioned within either the semiconductor die or the package structure of the semiconductor package to isolate the first electrical conductor from the second electrical conductor of the embedded capacitor.
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