发明授权
US09551059B2 Rare earth fluoride spray powder and rare earth fluoride-sprayed article
有权
稀土氟化物喷涂粉末和稀土氟化物喷涂制品
- 专利标题: Rare earth fluoride spray powder and rare earth fluoride-sprayed article
- 专利标题(中): 稀土氟化物喷涂粉末和稀土氟化物喷涂制品
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申请号: US14691187申请日: 2015-04-20
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公开(公告)号: US09551059B2公开(公告)日: 2017-01-24
- 发明人: Noriaki Hamaya , Takao Maeda , Yasushi Takai
- 申请人: SHIN-ETSU CHEMICAL CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人地址: JP Tokyo
- 代理机构: Westerman, Hattori, Daniels & Adrian, LLP
- 优先权: JP2011-246164 20111110
- 主分类号: C23C4/04
- IPC分类号: C23C4/04 ; C01F17/00 ; C23C4/10
摘要:
A powder comprising rare earth element fluoride particles having an aspect ratio of up to 2, an average particle size of 10-100 μm, a bulk density of 0.8-1.5 g/cm3, and a carbon content of 0.1-0.5 wt % is amenable to atmospheric plasma spraying. An article obtained by spraying the rare earth fluoride spray powder to a substrate undergoes few partial color changes and performs well even when used in a halogen gas plasma.