发明授权
US09553201B2 Thin film transistor, thin film transistor array panel, and manufacturing method of thin film transistor
有权
薄膜晶体管,薄膜晶体管阵列面板以及薄膜晶体管的制造方法
- 专利标题: Thin film transistor, thin film transistor array panel, and manufacturing method of thin film transistor
- 专利标题(中): 薄膜晶体管,薄膜晶体管阵列面板以及薄膜晶体管的制造方法
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申请号: US14179452申请日: 2014-02-12
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公开(公告)号: US09553201B2公开(公告)日: 2017-01-24
- 发明人: Byung Du Ahn , Ji Hun Lim , Gun Hee Kim , Kyoung Won Lee , Je Hun Lee , Hiroshi Goto , Aya Miki , Shinya Morita , Toshihiro Kugimiya , Yeon Hong Kim , Yeon Gon Mo , Kwang Suk Kim
- 申请人: Samsung Display Co., Ltd. , Kobe Steel, Ltd.
- 申请人地址: KR JP
- 专利权人: Samsung Display Co., Ltd.,Kobe Steel, Ltd.
- 当前专利权人: Samsung Display Co., Ltd.,Kobe Steel, Ltd.
- 当前专利权人地址: KR JP
- 代理机构: Innovation Counsel LLP
- 优先权: KR10-2012-0034101 20120402; KR10-2013-0108687 20130910
- 主分类号: H01L27/14
- IPC分类号: H01L27/14 ; H01L29/786
摘要:
The inventive concept relates to a thin film transistor and a thin film transistor array panel and, in detail, relates to a thin film transistor including an oxide semiconductor. A thin film transistor according to an exemplary embodiment of the inventive concept includes: a gate electrode; a gate insulating layer positioned on or under the gate electrode; a first semiconductor and a second semiconductor that overlap the gate electrode with the gate insulating layer interposed therebetween, the first semiconductor and the second semiconductor contacting each other; a source electrode connected to the second semiconductor; and a drain electrode connected to the second semiconductor and facing the source electrode, wherein the second semiconductor includes gallium (Ga) that is not included in the first semiconductor, and a content of gallium (Ga) in the second semiconductor is greater than 0 at. % and less than or equal to about 33 at. %.
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