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US09553498B2 Planar motor and processing apparatus and using the same 有权
平面电动机和加工设备使用相同

Planar motor and processing apparatus and using the same
摘要:
A planar motor includes a base provided with at least one stator, a mover provided on a top portion of a planar object to be placed on a top portion of the base, and moving according to a magnetic field generated by the stator, a mover support connected to the mover, supporting the mover from the planar object, and moving the mover according to a force of the magnetic field, and a controller supplying a control current to the stator to control location of the mover.
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