Invention Grant
- Patent Title: Vibrating device and manufacturing method therfor
- Patent Title (中): 振动装置及其制造方法
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Application No.: US14643286Application Date: 2015-03-10
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Publication No.: US09553561B2Publication Date: 2017-01-24
- Inventor: Keiichi Umeda , Takehiko Kishi , Toshio Nishimura , Takashi Hase
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagakakyo-shi, Kyoto-fu
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagakakyo-shi, Kyoto-fu
- Agency: Arent Fox LLP
- Priority: JP2012-201878 20120913
- Main IPC: H03H9/21
- IPC: H03H9/21 ; H03H3/007 ; H03H9/02 ; H03H9/24 ; H01L41/29 ; H01L41/31
Abstract:
A vibrating device having vibrating arms connected to a supporter. The vibrating arms have an n-type Si layer which is a degenerated semiconductor and an exciter provided on the n-type Si layer. The exciter has a piezoelectric thin film and a first and second electrodes with the piezoelectric thin film interposed therebetween.
Public/Granted literature
- US20150180449A1 VIBRATING DEVICE AND MANUFACTURING METHOD THERFOR Public/Granted day:2015-06-25
Information query
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