Invention Grant
US09554094B1 System and method for determining a displaced substrate with a vision system 有权
用于利用视觉系统确定置换的衬底的系统和方法

System and method for determining a displaced substrate with a vision system
Abstract:
A system and method for detecting and/or determining the existence of displacement of a substrate with respect to a surrounding object uses a laser line that is free of contact with the object and that is received by an image sensor. A processor reads the line information in a series of image frames, and generates a range image with height information. The height information is provided to a 2D map. Differences between adjacent height measurements, and averages, are computed. Vision system tools are used to accurately locate features in the image and these are aligned with the height information. The height differences are interpreted, with missing height data due, for example, to specularity in the image being approximated. The height differences are compared to predetermined height parameters relative to identified locations, for example, wells, in the object to determine whether a substrate is displaced.
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