发明授权
US09558972B2 Liquid treatment apparatus including return path and switching mechanism
有权
液体处理装置，包括返回路径和切换机构
- 专利标题： Liquid treatment apparatus including return path and switching mechanism
- 专利标题（中）： 液体处理装置，包括返回路径和切换机构
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申请号： US14289992申请日： 2014-05-29
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公开(公告)号： US09558972B2公开(公告)日： 2017-01-31
- 发明人: Tooru Nakamura
- 申请人： TOKYO ELECTRON LIMITED
- 申请人地址： JP Minato-Ku
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JP Minato-Ku
- 代理机构： Burr & Brown, PLLC
- 优先权： JP2013-116043 20130531
- 主分类号： H01L21/67
- IPC分类号： H01L21/67
摘要：
In one embodiment, a clean gas supply mechanism includes a supply path having an upstream end provided with a gas intake port, and a downstream end connected to a treatment chamber. The supply path is provided therein with a fan, and a filter disposed upstream of the fan. A return path branches from the supply path at a first position downstream of the fan and upstream of the treatment chamber and is connected to the supply path at a second position downstream of the filter and upstream of the fan. A switching mechanism selectively switches between a first state where the clean gas flows into the treatment chamber, and a second state where the clean gas returns to the supply path through the return path.
公开/授权文献
- US20140352741A1 LIQUID TREATMENT APPARATUS 公开/授权日：2014-12-04
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