发明授权
US09563132B2 Fluid handling structure, a lithographic apparatus and a device manufacturing method 有权
流体处理结构,光刻设备和装置制造方法

Fluid handling structure, a lithographic apparatus and a device manufacturing method
摘要:
A fluid handling structure for a lithographic apparatus, the fluid handling structure having, at a boundary of a space configured to contain immersion fluid to a region external to the fluid handling structure: a meniscus pinning feature to resist passage of immersion fluid in a radially outward direction from the space; a gas supply opening at least partly surrounding and radially outward of the meniscus pinning feature; and optionally a gas recovery opening radially outward of the gas supply opening, wherein the gas supply opening, or the gas recovery opening, or both the gas supply opening and the gas recovery opening, has an open area per meter length which has a variation peripherally around the space.
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