发明授权
- 专利标题： Articles including bonded metal structures and methods of preparing the same
- 专利标题（中）： 包括粘结金属结构的制品及其制备方法
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申请号： US14709924申请日： 2015-05-12
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公开(公告)号： US09570430B2公开(公告)日： 2017-02-14
- 发明人: Frank Kuechenmeister , Christian Klewer , Jens Oswald
- 申请人： GLOBALFOUNDRIES, Inc.
- 申请人地址： KY Grand Cayman
- 专利权人： GLOBALFOUNDRIES, INC.
- 当前专利权人： GLOBALFOUNDRIES, INC.
- 当前专利权人地址： KY Grand Cayman
- 代理机构： Lorenz & Kopf, LLP
- 主分类号： H01L25/00
- IPC分类号： H01L25/00 ; H01L23/00 ; H01L25/065 ; H01L23/31
摘要：
Articles including bonded metal structures and methods of preparing the same are provided herein. In an embodiment, a method of preparing an article that includes bonded metal structures includes providing a first substrate. A first metal structure and a second metal structure are formed on the first substrate. The first metal structure and the second metal structure each include an exposed contact surface. A bond mask is formed over the contact surface of the first metal structure. A second substrate is bonded to the first substrate through the exposed contact surface of the second metal structure. The bond mask remains disposed over the exposed contact surface of the second metal structure during bonding of the second substrate to the first substrate. A wire is bonded to the exposed contact surface of the first metal structure.
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