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US09570492B2 Pixel array of image sensor and method of fabricating the same 有权
图像传感器的像素阵列及其制造方法

Pixel array of image sensor and method of fabricating the same
Abstract:
A pixel array of an image sensor includes multiple red, green, blue and panchromatic pixels. The red, green and blue pixels are formed on a substrate during a first process. Planarization material is deposited to form the panchromatic pixels on the substrate and to form a planarization layer on the red, green and blue pixels during the same second process subsequent to the first process. The planarization material of the panchromatic pixels and the planarization layer is characterized in high transmittance and high aspect ratio.
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