发明授权
- 专利标题: Light modulator and exposure head
- 专利标题(中): 光调制器和曝光头
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申请号: US14478982申请日: 2014-09-05
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公开(公告)号: US09575389B2公开(公告)日: 2017-02-21
- 发明人: Masahide Okazaki , Toshiaki Suhara
- 申请人: DAINIPPON SCREEN MFG. CO., LTD. , OSAKA UNIVERSITY
- 申请人地址: JP Kyoto JP Osaka
- 专利权人: Screen Holdings Co., Ltd.,Osaka University
- 当前专利权人: Screen Holdings Co., Ltd.,Osaka University
- 当前专利权人地址: JP Kyoto JP Osaka
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2013-185223 20130906
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G02F1/29 ; G02F1/31
摘要:
A first electro-optic crystal substrate and a second electro-optic crystal substrate are provided as an electro-optic crystal substrate. The first electro-optic crystal substrate comprises a first periodic polarization reversal structure in which first polarization pairs, in each of which the directions of polarization in response to electric fields are opposite to each other, are arranged in a first period along a first arrangement direction which is orthogonal or inclined with respect to the direction of propagation, and light passes through the first periodic polarization reversal structure. The second electro-optic crystal substrate comprises a second periodic polarization reversal structure in which second polarization pairs, in each of which the directions of polarization in response to electric fields are opposite to each other, are arranged in a second period along a second arrangement direction which is orthogonal or inclined with respect to the direction of propagation, and light outstanding from the first electro-optic crystal substrate passes through the second periodic polarization reversal structure. At least one of a first condition and a second condition is satisfied. The first condition is that the first and the second periods are different from each other and a second condition is that the first arrangement direction and the second arrangement direction are different from each other.
公开/授权文献
- US20150070676A1 LIGHT MODULATOR AND EXPOSURE HEAD 公开/授权日:2015-03-12