Invention Grant
- Patent Title: Stocker and method for dispatching wafer carrier in stocker
- Patent Title (中): 储存器中调度晶片载体的储备器和方法
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Application No.: US14658631Application Date: 2015-03-16
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Publication No.: US09576834B2Publication Date: 2017-02-21
- Inventor: Wei-Cheng Wang , Feng-Ning Lee , Bing-Yuan Cheng
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Maschoff Brennan
- Main IPC: G06F7/00
- IPC: G06F7/00 ; H01L21/677 ; B65G1/04

Abstract:
A stocker includes a storage shelf, an output-relay shelf, a first crane, an output shelf, a second crane, and a controller. The storage shelf has a plurality of storage spaces. The output-relay shelf has a plurality of first output-relay spaces. The output shelf has an output space. The controller is configured to drive the first crane to preferentially transfer a first wafer carrier stored in one of the storage spaces to an empty one of the first output-relay spaces according to a delivery command defining a high priority of the first wafer carrier, and configured to drive the second crane to preferentially transfer the first wafer carrier from the first output-relay space storing the first wafer carrier to the output space according to the delivery command if the output space is empty.
Public/Granted literature
- US20160276194A1 STOCKER AND METHOD FOR DISPATCHING WAFER CARRIER IN STOCKER Public/Granted day:2016-09-22
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