Invention Grant
- Patent Title: Integrated circuits with self aligned contacts and methods of manufacturing the same
- Patent Title (中): 具有自对准触点的集成电路及其制造方法
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Application No.: US14751380Application Date: 2015-06-26
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Publication No.: US09576852B2Publication Date: 2017-02-21
- Inventor: Ming He , Seowoo Nam , Yann Mignot , Jim Kelly , Raghuveer Patlotta , Theodorus Standaert
- Applicant: GLOBALFOUNDRIES, INC. , STMicroelectronics, Inc. , International Business Machines Corporation
- Applicant Address: KY Grand Cayman US TX Coppell US NY Armonk
- Assignee: GLOBALFOUNDRIES, INC.,STMICROELECTRONICS, INC.,INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: GLOBALFOUNDRIES, INC.,STMICROELECTRONICS, INC.,INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: KY Grand Cayman US TX Coppell US NY Armonk
- Agency: Lorenz & Kopf, LLP
- Main IPC: H01L21/76
- IPC: H01L21/76 ; H01L21/768 ; H01L21/02 ; H01L23/528

Abstract:
Integrated circuits and methods for producing the same are provided. A method for producing an integrated circuit includes forming an interconnect in a first interlayer dielectric. A first cap is formed overlying the first interlayer dielectric adjacent to the interconnect, and a second interlayer dielectric is formed overlying the first interlayer dielectric, the interconnect, and the cap. A contact is formed through the second interlayer dielectric, where the contact includes an overlap region and a connection region. The overlap region directly overlies the first interlayer dielectric adjacent to the interconnect, and the connection region directly contacts the interconnect. The first cap is positioned between the overlap region and the first interlayer dielectric.
Public/Granted literature
- US20160379881A1 INTEGRATED CIRCUITS WITH SELF ALIGNED CONTACTS AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2016-12-29
Information query
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