Invention Grant
- Patent Title: Metal wires of a stacked inductor
- Patent Title (中): 堆叠电感器的金属线
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Application No.: US13909464Application Date: 2013-06-04
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Publication No.: US09577023B2Publication Date: 2017-02-21
- Inventor: Edward C. Cooney, III , Dinh Dang , David A. DeMuynck , Sarah A. McTaggart , Gary L. Milo , Melissa J. Roma , Jeffrey L. Thompson , Thomas W. Weeks
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agent Anthony J. Canale
- Main IPC: H01F5/00
- IPC: H01F5/00 ; H01L21/00 ; H01L21/44 ; H01L21/4763 ; H01L27/08 ; H01L49/02 ; H01L23/522 ; H01L23/532

Abstract:
A method including forming a first metal wire in a first dielectric layer, the first metal wire including a first vertical side opposite from a second vertical side; and forming a second metal wire in a second dielectric layer above the first dielectric layer, the second metal wire including a third vertical side opposite from a fourth vertical side, where the first vertical side is laterally offset from the third vertical side by a first predetermined distance, and the second vertical side is laterally offset from the fourth vertical side by a second predetermined distance, where the first metal wire and the second metal wire are in direct contact with one another.
Public/Granted literature
- US20140354392A1 METAL WIRES OF A STACKED INDUCTOR Public/Granted day:2014-12-04
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