Invention Grant
- Patent Title: Metal seal for ultra high vacuum system
- Patent Title (中): 超高真空系统金属密封
-
Application No.: US13437107Application Date: 2012-04-02
-
Publication No.: US09581245B2Publication Date: 2017-02-28
- Inventor: Qingpo Xi , Tao Li , Feng Cao , Fumin He , Zhongwei Chen
- Applicant: Qingpo Xi , Tao Li , Feng Cao , Fumin He , Zhongwei Chen
- Applicant Address: TW Hsinchu
- Assignee: HERMES MICROVISION, INC.
- Current Assignee: HERMES MICROVISION, INC.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, PC
- Agent Justin King; Douglas Hosack
- Main IPC: F16L23/20
- IPC: F16L23/20 ; F16J15/08
Abstract:
A metal seal flange assembly for a vacuum system is presented. Its metal gasket has a crossectional shape that is an irregular hexagon with two acute angles between the longest side and the second- and third-longest sides, respectively. The longest side of the irregular hexagon is the vertical inner wall of the metal gasket. This design can reduce the normal force required to seal the metal seal flange assembly and reduce the number of bolts needed, enabling use in a limited working space.
Public/Granted literature
- US20130257044A1 METAL SEAL FOR ULTRA HIGH VACUUM SYSTEM Public/Granted day:2013-10-03
Information query
IPC分类:
