发明授权
- 专利标题： Metal seal for ultra high vacuum system
- 专利标题（中）： 超高真空系统金属密封
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申请号： US13437107申请日： 2012-04-02
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公开(公告)号： US09581245B2公开(公告)日： 2017-02-28
- 发明人: Qingpo Xi , Tao Li , Feng Cao , Fumin He , Zhongwei Chen
- 申请人： Qingpo Xi , Tao Li , Feng Cao , Fumin He , Zhongwei Chen
- 申请人地址： TW Hsinchu
- 专利权人： HERMES MICROVISION, INC.
- 当前专利权人： HERMES MICROVISION, INC.
- 当前专利权人地址： TW Hsinchu
- 代理机构： WPAT, PC
- 代理商 Justin King; Douglas Hosack
- 主分类号： F16L23/20
- IPC分类号： F16L23/20 ; F16J15/08
摘要：
A metal seal flange assembly for a vacuum system is presented. Its metal gasket has a crossectional shape that is an irregular hexagon with two acute angles between the longest side and the second- and third-longest sides, respectively. The longest side of the irregular hexagon is the vertical inner wall of the metal gasket. This design can reduce the normal force required to seal the metal seal flange assembly and reduce the number of bolts needed, enabling use in a limited working space.
公开/授权文献
- US20130257044A1 METAL SEAL FOR ULTRA HIGH VACUUM SYSTEM 公开/授权日：2013-10-03