Invention Grant
US09581498B2 Rotating-element spectroscopic ellipsometer and method for measurement precision prediction of rotating-element spectroscopic ellipsometer, recording medium storing program for executing the same, and computer program stored in medium for executing the same
有权
旋转元件分光椭偏仪和旋转元件分光椭偏仪的测量精度预测方法，用于执行旋转元件分光椭偏仪的记录介质存储程序和存储在用于执行该程序的介质中的计算机程序
- Patent Title: Rotating-element spectroscopic ellipsometer and method for measurement precision prediction of rotating-element spectroscopic ellipsometer, recording medium storing program for executing the same, and computer program stored in medium for executing the same
- Patent Title (中): 旋转元件分光椭偏仪和旋转元件分光椭偏仪的测量精度预测方法，用于执行旋转元件分光椭偏仪的记录介质存储程序和存储在用于执行该程序的介质中的计算机程序
-
Application No.: US14969096Application Date: 2015-12-15
-
Publication No.: US09581498B2Publication Date: 2017-02-28
- Inventor: Yong Jai Cho , Won Chegal , Hyun Mo Cho
- Applicant: Korea Research Institute of Standards and Science
- Applicant Address: KR Daejeon
- Assignee: Korea Research Institute of Standards and Science
- Current Assignee: Korea Research Institute of Standards and Science
- Current Assignee Address: KR Daejeon
- Agency: The Webb Law Firm
- Priority: KR10-2014-0180875 20141216
- Main IPC: G01J4/00
- IPC: G01J4/00 ; G01J3/447 ; G01J4/04 ; G01N21/21
Abstract:
Provided are a rotating-element spectroscopic ellipsometer and a method for measurement precision prediction of a rotating-element spectroscopic ellipsometer, a recording medium storing program for executing the same, and a computer program stored in a medium for executing the same, and more particularly, a rotating-element spectroscopic ellipsometer and a method for measurement precision prediction of a rotating-element spectroscopic ellipsometer capable of calculating the measurement precision of the rotating-element spectroscopic ellipsometer based on a theoretical equation on standard deviations of ellipsometric parameters for a sample, a recording medium storing program for executing the same, and a computer program stored in a medium for executing the same.
Public/Granted literature
Information query
