Invention Grant
- Patent Title: Installation fixture for elastomer bands
- Patent Title (中): 弹性带安装夹具
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Application No.: US14109400Application Date: 2013-12-17
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Publication No.: US09583377B2Publication Date: 2017-02-28
- Inventor: Rish Chhatre , David Schaefer
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: US CA Fremont
- Main IPC: B23Q1/70
- IPC: B23Q1/70 ; H01L21/70 ; H01L21/67 ; H01L21/687

Abstract:
An installation fixture adapted to mount an elastomer band in a mounting groove around a semiconductor substrate support used for supporting a semiconductor substrate in a plasma processing chamber is disclosed, which includes an annular ring having a vertically extending portion on an outer edge of the ring and adapted to receive the elastomer band, and a base plate configured to be attached to the annular ring, the base plate having a plurality of radially extending portions adapted to receive a plurality of mechanical fasteners at locations corresponding to mounting holes in the semiconductor substrate support.
Public/Granted literature
- US20150170942A1 INSTALLATION FIXTURE FOR ELASTOMER BANDS Public/Granted day:2015-06-18
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