发明授权
- 专利标题: Installation fixture for elastomer bands
- 专利标题(中): 弹性带安装夹具
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申请号: US14109400申请日: 2013-12-17
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公开(公告)号: US09583377B2公开(公告)日: 2017-02-28
- 发明人: Rish Chhatre , David Schaefer
- 申请人: Lam Research Corporation
- 申请人地址: US CA Fremont
- 专利权人: LAM RESEARCH CORPORATION
- 当前专利权人: LAM RESEARCH CORPORATION
- 当前专利权人地址: US CA Fremont
- 主分类号: B23Q1/70
- IPC分类号: B23Q1/70 ; H01L21/70 ; H01L21/67 ; H01L21/687
摘要:
An installation fixture adapted to mount an elastomer band in a mounting groove around a semiconductor substrate support used for supporting a semiconductor substrate in a plasma processing chamber is disclosed, which includes an annular ring having a vertically extending portion on an outer edge of the ring and adapted to receive the elastomer band, and a base plate configured to be attached to the annular ring, the base plate having a plurality of radially extending portions adapted to receive a plurality of mechanical fasteners at locations corresponding to mounting holes in the semiconductor substrate support.
公开/授权文献
- US20150170942A1 INSTALLATION FIXTURE FOR ELASTOMER BANDS 公开/授权日:2015-06-18
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