发明授权
- 专利标题: Integrated device comprising stacked dies on redistribution layers
- 专利标题(中): 集成器件包括重分布层上的堆叠管芯
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申请号: US14181371申请日: 2014-02-14
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公开(公告)号: US09583460B2公开(公告)日: 2017-02-28
- 发明人: Urmi Ray , Shiqun Gu
- 申请人: QUALCOMM Incorporated
- 申请人地址: US CA San Diego
- 专利权人: QUALCOMM Incorporated
- 当前专利权人: QUALCOMM Incorporated
- 当前专利权人地址: US CA San Diego
- 代理机构: Loza & Loza, LLP
- 主分类号: H01L25/065
- IPC分类号: H01L25/065 ; H01L23/48 ; H01L21/48 ; H01L25/00
摘要:
Some features pertain to an integrated device that includes a dielectric layer configured as a base for the integrated device, several redistribution metal layers in the dielectric layer, a first wafer level die coupled to a first surface of the dielectric layer, and a second wafer level die coupled to the first wafer level die. The dielectric layer includes several dielectric layers. In some implementations, the first wafer level die is coupled to the redistribution metal layers through a first set of interconnects. In some implementations, the first wafer level die includes several through substrate vias (TSVs). In some implementations, the second wafer level die is coupled to the redistribution metal layers through a first set of interconnects, the TSVs, a second set of interconnects, and a set of solder balls. In some implementations, the integrated device includes an encapsulation layer that encapsulates the first and second wafer level dies.
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