Invention Grant
US09583625B2 Fin structures and multi-Vt scheme based on tapered fin and method to form
有权
翅片结构和多Vt方案基于锥形翅片和方法形成
- Patent Title: Fin structures and multi-Vt scheme based on tapered fin and method to form
- Patent Title (中): 翅片结构和多Vt方案基于锥形翅片和方法形成
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Application No.: US14523548Application Date: 2014-10-24
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Publication No.: US09583625B2Publication Date: 2017-02-28
- Inventor: Xusheng Wu , Min-hwa Chi , Edmund Kenneth Banghart
- Applicant: GLOBALFOUNDRIES, Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/06 ; H01L29/10

Abstract:
A method of forming a FinFET fin with low-doped and a highly-doped active portions and/or a FinFET fin having tapered sidewalls for Vt tuning and multi-Vt schemes and the resulting device are provided. Embodiments include forming an Si fin, the Si fin having a top active portion and a bottom active portion; forming a hard mask on a top surface of the Si fin; forming an oxide layer on opposite sides of the Si fin; implanting a dopant into the Si fin; recessing the oxide layer to reveal the active top portion of the Si fin; etching the top active portion of the Si fin to form vertical sidewalls; forming a nitride spacer covering each vertical sidewall; recessing the recessed oxide layer to reveal the active bottom portion of the Si fin; and tapering the active bottom portion of the Si fin.
Public/Granted literature
- US20160118500A1 FIN STRUCTURES AND MULTI-VT SCHEME BASED ON TAPERED FIN AND METHOD TO FORM Public/Granted day:2016-04-28
Information query
IPC分类: