Invention Grant
US09587311B2 Display apparatus including a thin film encapsulation layer and apparatus for and method of manufacturing the display apparatus 有权
显示装置,包括薄膜封装层以及用于制造显示装置的方法

Display apparatus including a thin film encapsulation layer and apparatus for and method of manufacturing the display apparatus
Abstract:
A display apparatus and an apparatus for and method of manufacturing the display apparatus. The display apparatus includes: a substrate; a display unit formed on the substrate; and a thin film encapsulation layer formed on the display unit. The thin film encapsulation layer includes an inorganic layer, and the inorganic layer includes a first sub-inorganic layer including a compound oxide including at least two of aluminum (Al), zinc (Zn), zirconium (Zn), and hafnium (Hf).
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