发明授权
- 专利标题: Non-destructive inspection system for display panel and method, and non-destructive inspection apparatus thereof
- 专利标题(中): 显示面板及其无损检测系统及其无损检测装置
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申请号: US14540453申请日: 2014-11-13
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公开(公告)号: US09588060B2公开(公告)日: 2017-03-07
- 发明人: Yeong Ri Jung , Ki Wan Kim , Jae Young Kim
- 申请人: Samsung Electronics Co., Ltd. , Oz-tec Co., Ltd
- 申请人地址: KR Suwon-si KR Daegu
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.,OZ-TEC CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.,OZ-TEC CO., LTD.
- 当前专利权人地址: KR Suwon-si KR Daegu
- 代理机构: Staas & Halsey LLP
- 优先权: KR10-2013-0139188 20131115
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01N21/95 ; G01N21/88
摘要:
A non-destructive inspection apparatus includes a light source generating light, an optical coupler which divides the light, irradiates the divided light to a reference part and a sample part, generates coherent light, and transmits the coherent light to a detecting part, the reference part which phase-scans the irradiated light and reflects the light, the sample part which irradiates the light incident from the optical coupler to a display panel, and scans and reflects the light reflected from the display panel, the detecting part which obtains an image signal of the display panel from the coherent light, a transferring part which moves a position of the sample part, and the control part which generates an image of the display panel based on the image signal of the display panel transmitted from the detecting part and detects a foreign substance, and controls movement of the transferring part.
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