Invention Grant
US09588190B2 Resonant MEMS lorentz-force magnetometer using force-feedback and frequency-locked coil excitation
有权
使用力反馈和频率锁定线圈激励的共振MEMS洛伦兹力磁力计
- Patent Title: Resonant MEMS lorentz-force magnetometer using force-feedback and frequency-locked coil excitation
- Patent Title (中): 使用力反馈和频率锁定线圈激励的共振MEMS洛伦兹力磁力计
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Application No.: US13729516Application Date: 2012-12-28
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Publication No.: US09588190B2Publication Date: 2017-03-07
- Inventor: Eric B. Smith , Riad Wahby , Yan Zhou
- Applicant: Silicon Laboratories Inc.
- Applicant Address: US TX Austin
- Assignee: Silicon Laboratories Inc.
- Current Assignee: Silicon Laboratories Inc.
- Current Assignee Address: US TX Austin
- Agency: Zagorin Cave LLP
- Main IPC: G01R33/028
- IPC: G01R33/028 ; B81B3/00
Abstract:
A method includes supplying a current to at least one conductive path integral with a MEMS device to thereby exert a Lorentz force on the MEMS device in the presence of a magnetic field. The method includes determining the magnetic field based on a control value in a control loop configured to maintain a constrained range of motion of the MEMS device. The control loop may be configured to maintain the MEMS device in a stationary position. The current may have a frequency equal to a resonant frequency of the MEMS device.
Public/Granted literature
- US20140049256A1 RESONANT MEMS LORENTZ-FORCE MAGNETOMETER USING FORCE-FEEDBACK AND FREQUENCY-LOCKED COIL EXCITATION Public/Granted day:2014-02-20
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