Invention Grant
- Patent Title: MEMS based photonic devices and methods for forming
- Patent Title (中): 基于MEMS的光子器件和形成方法
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Application No.: US14749806Application Date: 2015-06-25
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Publication No.: US09588293B2Publication Date: 2017-03-07
- Inventor: John J. Ellis-Monaghan , Brendan S. Harris , Vibhor Jain , Thomas Kessler , Yves T. Ngu , Sebastian T. Ventrone
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Hoffman Warnick LLC
- Agent Steven J. Meyers
- Main IPC: G02B6/12
- IPC: G02B6/12 ; G02B6/125 ; G02B6/122 ; G02B6/35 ; G02B6/28 ; B81B7/02

Abstract:
Various particular embodiments include a primary waveguide including an end section; cantilevered waveguides, each cantilevered waveguide including an end section disposed adjacent the end section of the primary waveguide; and control pins for applying an electrical bias to the cantilevered waveguides to selectively displace the end sections of the cantilevered waveguides away from the end section of the primary waveguide.
Public/Granted literature
- US20160377805A1 MEMS BASED PHOTONIC DEVICES AND METHODS FOR FORMING Public/Granted day:2016-12-29
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