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US09588293B2 MEMS based photonic devices and methods for forming 有权
基于MEMS的光子器件和形成方法

MEMS based photonic devices and methods for forming
Abstract:
Various particular embodiments include a primary waveguide including an end section; cantilevered waveguides, each cantilevered waveguide including an end section disposed adjacent the end section of the primary waveguide; and control pins for applying an electrical bias to the cantilevered waveguides to selectively displace the end sections of the cantilevered waveguides away from the end section of the primary waveguide.
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