Invention Grant
US09589352B2 Position controller, method of controlling position, and apparatus including the position controller 有权
位置控制器,位置控制方法以及包括位置控制器在内的设备

Position controller, method of controlling position, and apparatus including the position controller
Abstract:
A position controller, including a moving part configured to process or measure a workpiece, a laser unit disposed on one side of the moving part and configured to radiate a laser, a mask on which a laser image is formed corresponding to the irradiated laser, and a position control unit configured to position the moving part based on information of the laser image.
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