Invention Grant
US09589778B2 Multi-dopant permeation tube with two chambers for introducing dopants into a spectrometry system
有权
具有两个腔室的多掺杂剂渗透管，用于将掺杂剂引入光谱测定系统
- Patent Title: Multi-dopant permeation tube with two chambers for introducing dopants into a spectrometry system
- Patent Title (中): 具有两个腔室的多掺杂剂渗透管，用于将掺杂剂引入光谱测定系统
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Application No.: US15000579Application Date: 2016-01-19
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Publication No.: US09589778B2Publication Date: 2017-03-07
- Inventor: Timothy B. Burton , Stephen Scott Milt
- Applicant: DSA DETECTION LLC
- Applicant Address: US MA North Andover
- Assignee: DSA DETECTION LLC
- Current Assignee: DSA DETECTION LLC
- Current Assignee Address: US MA North Andover
- Agency: Lando & Anastasi, LLP
- Main IPC: H01J49/00
- IPC: H01J49/00 ; H01J49/04 ; G01N27/62
Abstract:
Aspects and embodiments of the present invention are directed to spectrometry systems and for apparatus and methods for delivering dopants to same. In one example, there is provided a dopant delivery device configured to supply dopants to a spectrometry system comprising a tube including a first chamber and a second chamber, a first dopant source included in the first chamber, and a second dopant source included in the second chamber.
Public/Granted literature
- US20160133449A1 MULTI-DOPANT PERMEATION TUBE Public/Granted day:2016-05-12
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