Invention Grant
- Patent Title: Glass substrate transfer system and robot arm thereof
- Patent Title (中): 玻璃基板转印系统及其机器人手臂
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Application No.: US14396038Application Date: 2014-09-22
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Publication No.: US09589825B2Publication Date: 2017-03-07
- Inventor: Shih Ying Sun
- Applicant: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Shenzhen, Guangdong
- Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
- Current Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
- Current Assignee Address: CN Shenzhen, Guangdong
- Agent Andrew C. Cheng
- Priority: CN2014104595336 20140910
- International Application: PCT/CN2014/087032 WO 20140922
- International Announcement: WO2016/037383 WO 20160317
- Main IPC: H01L21/683
- IPC: H01L21/683 ; C03B35/20 ; H01L21/687 ; F27D3/00
Abstract:
A glass substrate transfer system and a robot arm thereof are provided. The robot arm includes: a substrate fork, a moving assembly and a vacuum chuck. The substrate fork is for taking a glass substrate. The moving assembly is connected with the substrate fork and for making the substrate fork to be moved in a working space. The vacuum chuck is disposed on the substrate fork and for sucking the glass substrate. The vacuum chuck is formed with a fluid path, and the fluid path is contained with a cooling fluid to dissipate heat of the vacuum chuck. The glass substrate transfer system and its robot arm provided by the present invention cool the vacuum chuck in time and thus can avoid affecting the product quality caused by the vacuum chuck being overheated, and the product yield is improved.
Public/Granted literature
- US20160068426A1 GLASS SUBSTRATE TRANSFER SYSTEM AND ROBOT ARM THEREOF Public/Granted day:2016-03-10
Information query
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