Invention Grant
US09589849B2 Methods of modulating strain in PFET and NFET FinFET semiconductor devices
有权
调制PFET和NFET FinFET半导体器件中的应变的方法
- Patent Title: Methods of modulating strain in PFET and NFET FinFET semiconductor devices
- Patent Title (中): 调制PFET和NFET FinFET半导体器件中的应变的方法
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Application No.: US14633353Application Date: 2015-02-27
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Publication No.: US09589849B2Publication Date: 2017-03-07
- Inventor: Ajey Poovannummoottil Jacob , Murat Kerem Akarvardar , Bruce Doris , Ali Khakifirooz
- Applicant: GLOBALFOUNDRIES Inc. , International Business Machines Corporation
- Applicant Address: KY Grand Cayman US NY Armonk
- Assignee: GLOBALFOUNDRIES Inc.,International Business Machines Corporation
- Current Assignee: GLOBALFOUNDRIES Inc.,International Business Machines Corporation
- Current Assignee Address: KY Grand Cayman US NY Armonk
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L21/306 ; H01L21/762 ; H01L29/165

Abstract:
One illustrative method disclosed herein includes, among other things, forming a plurality of initial fins that have the same initial axial length and the same initial strain above a substrate, performing at least one etching process so as to cut a first fin to a first axial length and to cut a second fin to a second axial length that is less than the first axial length, wherein the cut first fin retains a first amount of the initial strain and the cut second fin retains about zero of the initial strain or a second amount of the initial strain that is less than the first amount, and forming gate structures around the first and second cut fins to form FinFET devices.
Public/Granted literature
- US20160254195A1 METHODS OF MODULATING STRAIN IN PFET AND NFET FINFET SEMICONDUCTOR DEVICES Public/Granted day:2016-09-01
Information query
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