Invention Grant
US09590046B2 Monocrystalline SiC substrate with a non-homogeneous lattice plane course
有权
具有非均匀晶格平面过程的单晶SiC衬底
- Patent Title: Monocrystalline SiC substrate with a non-homogeneous lattice plane course
- Patent Title (中): 具有非均匀晶格平面过程的单晶SiC衬底
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Application No.: US14258345Application Date: 2014-04-22
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Publication No.: US09590046B2Publication Date: 2017-03-07
- Inventor: Thomas Straubinger , Michael Vogel , Andreas Wohlfart
- Applicant: SICRYSTAL AKTIENGESELLSCHAFT
- Applicant Address: DE Nuremberg
- Assignee: SiCrystal Aktiengesellschaft
- Current Assignee: SiCrystal Aktiengesellschaft
- Current Assignee Address: DE Nuremberg
- Agent Laurence A. Greenberg; Werner H. Stemer; Ralph E. Locher
- Main IPC: C30B23/02
- IPC: C30B23/02 ; H01L29/16 ; C30B29/36 ; H01L29/04 ; H01L29/06

Abstract:
A method is used for producing an SiC volume monocrystal by sublimation growth. During growth, by sublimation of a powdery SiC source material and by transport of the sublimated gaseous components into the crystal growth region, an SiC growth gas phase is produced there. The SiC volume monocrystal grows by deposition from the SiC growth gas phase on the SiC seed crystal. The SiC seed crystal is bent during a heating phase before such that an SiC crystal structure with a non-homogeneous course of lattice planes is adjusted, the lattice planes at each point have an angle of inclination relative to the direction of the center longitudinal axis and peripheral angles of inclination at a radial edge of the SiC seed crystal differ in terms of amount by at least 0.05° and at most by 0.2° from a central angle of inclination at the site of the center longitudinal axis.
Public/Granted literature
- US20140225127A1 MONOCRYSTALLINE SIC SUBSTRATE WITH A NON-HOMOGENEOUS LATTICE PLANE COURSE Public/Granted day:2014-08-14
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