Invention Grant
- Patent Title: Magnetoresistive memory device and manufacturing method of the same
- Patent Title (中): 磁阻存储器件及其制造方法相同
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Application No.: US14629120Application Date: 2015-02-23
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Publication No.: US09590174B2Publication Date: 2017-03-07
- Inventor: Masaru Toko , Kuniaki Sugiura , Yutaka Hashimoto , Katsuya Nishiyama , Tadashi Kai
- Applicant: Masaru Toko , Kuniaki Sugiura , Yutaka Hashimoto , Katsuya Nishiyama , Tadashi Kai
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Holtz, Holtz & Volek PC
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/00 ; H01L43/12 ; H01L43/08 ; H01L43/02 ; H01L27/22

Abstract:
According to one embodiment, a manufacturing method of a magnetoresistive memory device includes forming a first magnetic layer on a substrate, forming a magnetoresistive effect element on the first magnetic layer, forming a mask on a part of the magnetoresistive effect element, selectively etching the magnetoresistive effect element using the mask, forming a sidewall insulating film on a sidewall of the magnetoresistive effect element exposed by the etching, selectively etching the first magnetic layer using the mask and the sidewall insulating film and forming a deposition layer containing a magnetic material on a sidewall of the first magnetic layer and the sidewall insulating film, and introducing ions into the deposition layer.
Public/Granted literature
- US20160104834A1 MAGNETORESISTIVE MEMORY DEVICE AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2016-04-14
Information query
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