Invention Grant
US09593012B2 Method for producing a micromechanical component, and corresponding micromechanical component 有权
微机械部件的制造方法以及相应的微机械部件

  • Patent Title: Method for producing a micromechanical component, and corresponding micromechanical component
  • Patent Title (中): 微机械部件的制造方法以及相应的微机械部件
  • Application No.: US14774799
    Application Date: 2014-03-12
  • Publication No.: US09593012B2
    Publication Date: 2017-03-14
  • Inventor: Friedjof HeuckChristoph Schelling
  • Applicant: Robert Bosch GmbH
  • Applicant Address: DE Stuttgart
  • Assignee: Robert Bosch GmbH
  • Current Assignee: Robert Bosch GmbH
  • Current Assignee Address: DE Stuttgart
  • Agency: Maginot, Moore & Beck LLP
  • Priority: DE102013204475 20130314
  • International Application: PCT/EP2014/054876 WO 20140312
  • International Announcement: WO2014/140120 WO 20140918
  • Main IPC: B81C1/00
  • IPC: B81C1/00
Method for producing a micromechanical component, and corresponding micromechanical component
Abstract:
A method for producing a micromechanical component includes providing a substrate with a monocrystalline starting layer which is exposed in structured regions. The structured regions have an upper face and lateral flanks, wherein a catalyst layer, which is suitable for promoting a silicon epitaxial growth of the exposed upper face of the structured monocrystalline starting layer, is provided on the upper face, and no catalyst layers are provided on the flanks. The method also includes carrying out a selective epitaxial growth process on the upper face of the monocrystalline starting layer using the catalyst layer in a reactive gas atmosphere in order to form a micromechanical functional layer.
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