Invention Grant
- Patent Title: Gas line weldment design and process for CVD aluminum
- Patent Title (中): 气体线焊接设计和CVD铝合金工艺
-
Application No.: US14029462Application Date: 2013-09-17
-
Publication No.: US09593417B2Publication Date: 2017-03-14
- Inventor: Wei Ti Lee , Ted Guo , Steve H. Chiao , Alan A. Ritchie
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C14/16 ; C23C16/44
Abstract:
A system of gas lines for a processing chamber and a method of forming a gas line system for a processing chamber are provided. The system of gas lines includes electropolished multi-way valves that connect electropolished linear gas lines. By using multi-way valves rather than tee-fittings and electropolishing the linear gas lines, the nucleation of contaminating particles in the system of gas lines may be reduced.
Public/Granted literature
- US20140053776A1 GAS LINE WELDMENT DESIGN AND PROCESS FOR CVD ALUMINUM Public/Granted day:2014-02-27
Information query
IPC分类:
