Invention Grant
US09594240B2 Lighting apparatus, and optical inspection apparatus and optical microscope using the lighting apparatus 有权
照明装置,光学检查装置以及使用该照明装置的光学显微镜

Lighting apparatus, and optical inspection apparatus and optical microscope using the lighting apparatus
Abstract:
Provided are a lighting apparatus, and an optical inspection apparatus and an optical microscope using the lighting apparatus. The lighting apparatus includes a light source that emits light, an optical device that outputs light that is more uniformly intense over a predetermined ray angle distribution than light input thereto; a multi-reflection device that reflects light multiple times, the multi-reflection device having a light incident surface receiving light and a light emission surface that emits multiply reflected light, and a light diffusion device that diffuses the light emitted from the light emission surface of the multi-reflection device. The light source, the optical device, the multi-reflection device, and light diffusion device share an optical path.
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