Invention Grant
US09594240B2 Lighting apparatus, and optical inspection apparatus and optical microscope using the lighting apparatus
有权
照明装置,光学检查装置以及使用该照明装置的光学显微镜
- Patent Title: Lighting apparatus, and optical inspection apparatus and optical microscope using the lighting apparatus
- Patent Title (中): 照明装置,光学检查装置以及使用该照明装置的光学显微镜
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Application No.: US14559337Application Date: 2014-12-03
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Publication No.: US09594240B2Publication Date: 2017-03-14
- Inventor: Nobuyuki Kimura , Mitsuhiro Togashi , Masaki Takada , Mitsunori Numata
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-Si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-Si, Gyeonggi-Do
- Agency: Lee & Morse, P.C.
- Priority: JP2013-253528 20131206; KR10-2014-0062589 20140523
- Main IPC: G02B6/00
- IPC: G02B6/00 ; G02B21/06 ; G02B21/00 ; G02B21/08 ; G02B27/09 ; F21V8/00 ; G02B6/036

Abstract:
Provided are a lighting apparatus, and an optical inspection apparatus and an optical microscope using the lighting apparatus. The lighting apparatus includes a light source that emits light, an optical device that outputs light that is more uniformly intense over a predetermined ray angle distribution than light input thereto; a multi-reflection device that reflects light multiple times, the multi-reflection device having a light incident surface receiving light and a light emission surface that emits multiply reflected light, and a light diffusion device that diffuses the light emitted from the light emission surface of the multi-reflection device. The light source, the optical device, the multi-reflection device, and light diffusion device share an optical path.
Public/Granted literature
- US20150160445A1 LIGHTING APPARATUS, AND OPTICAL INSPECTION APPARATUS AND OPTICAL MICROSCOPE USING THE LIGHTING APPARATUS Public/Granted day:2015-06-11
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