Invention Grant
- Patent Title: Semiconductor device
- Patent Title (中): 半导体器件
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Application No.: US15082443Application Date: 2016-03-28
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Publication No.: US09595541B2Publication Date: 2017-03-14
- Inventor: Shunpei Yamazaki , Masahiko Hayakawa , Shinpei Matsuda , Daisuke Matsubayashi
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP
- Agency: Husch Blackwell LLP
- Priority: JP2013-119146 20130605; JP2014-004227 20140114; JP2014-054449 20140318
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/12 ; H01L27/12 ; H01L29/786 ; H01L29/49

Abstract:
Provided is a semiconductor device including a transistor having excellent electrical characteristics (e.g., on-state current, field-effect mobility, or frequency characteristics) or a semiconductor device including a transistor with high reliability. In the channel width direction of a channel-etched transistor in which an oxide semiconductor film is between first and second gate electrodes, the first and second gate electrodes are connected to each other through an opening portion in first and second gate insulating films. In addition, the first and second gate electrodes surround the oxide semiconductor film in a cross-section in the channel width direction, with the first gate insulating film provided between the first gate electrode and the oxide semiconductor film and the second gate insulating film provided between the second gate electrode and the oxide semiconductor film. Furthermore, the channel length of the transistor is 0.5 μm or longer and 6.5 μm or shorter.
Public/Granted literature
- US20160276372A1 Semiconductor Device Public/Granted day:2016-09-22
Information query
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