发明授权
- 专利标题: Electrostatic actuator
- 专利标题(中): 静电执行机构
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申请号: US13639017申请日: 2011-04-28
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公开(公告)号: US09595892B2公开(公告)日: 2017-03-14
- 发明人: Norio Takahashi
- 申请人: Norio Takahashi
- 申请人地址: JP Shinjuku-Ku
- 专利权人: Dai Nippon Printing Co., Ltd.
- 当前专利权人: Dai Nippon Printing Co., Ltd.
- 当前专利权人地址: JP Shinjuku-Ku
- 代理机构: Burr & Brown, PLLC
- 优先权: JP2010-122637 20100528
- 国际申请: PCT/JP2011/060425 WO 20110428
- 国际公布: WO2011/148758 WO 20111201
- 主分类号: H02N1/00
- IPC分类号: H02N1/00 ; H02N3/00
摘要:
An electrostatic actuator 100 includes: a stator 1 that includes a substrate 102 and a plurality of linear electrodes 1a to 1d separately provided on the substrate 102 and arranged in parallel; and a movable element 2 disposed on the linear electrodes 1a to 1d of the stator 1. Multiple projecting elements 104b are provided at regular intervals on a surface of the stator 1 so as to face the movable element 2, forming a mat surface. A smooth layer 105 is formed on a surface of the movable element 2 so as to face the mat surface.
公开/授权文献
- US20130026879A1 ELECTROSTATIC ACTUATOR 公开/授权日:2013-01-31