Invention Grant
- Patent Title: Semiconductor fuses with nanowire fuse links and fabrication methods thereof
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Application No.: US14865589Application Date: 2015-09-25
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Publication No.: US09601428B2Publication Date: 2017-03-21
- Inventor: Chun Yu Wong , Jagar Singh , Ashish Baraskar , Min-hwa Chi
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent Nathan B. Davis
- Main IPC: H01L23/525
- IPC: H01L23/525 ; H01L29/66 ; H01L29/78 ; H01L21/02 ; H01L21/3205 ; H01L21/283 ; H01L29/06 ; H01L27/112

Abstract:
Semiconductor fuses with nanowire fuse links and fabrication methods thereof are presented. The methods include, for instance: fabricating a semiconductor fuse, the semiconductor fuse including at least one nanowire fuse link, and the fabricating including: forming at least one nanowire, the at least one nanowire including a semiconductor material; and reacting the at least one nanowire with a metal to form the at least one nanowire fuse link of the semiconductor fuse, the at least one nanowire fuse link including a semiconductor-metal alloy. In another aspect, a structure is presented. The structure includes: a semiconductor fuse, the semiconductor fuse including: at least one nanowire fuse link, the at least one nanowire fuse link including a semiconductor-metal alloy.
Public/Granted literature
- US20160284643A1 SEMICONDUCTOR FUSES WITH NANOWIRE FUSE LINKS AND FABRICATION METHODS THEREOF Public/Granted day:2016-09-29
Information query
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