Invention Grant
- Patent Title: Zig-zag trench structure to prevent aspect ratio trapping defect escape
-
Application No.: US14578523Application Date: 2014-12-22
-
Publication No.: US09601565B2Publication Date: 2017-03-21
- Inventor: Judson R. Holt , Shogo Mochizuki , Alexander Reznicek , Melissa A. Smith
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Yuanmin Cai
- Main IPC: H01L31/0328
- IPC: H01L31/0328 ; H01L31/0336 ; H01L29/00 ; H01L29/06 ; H01L29/66 ; H01L29/78 ; H01L29/778 ; H01L21/02

Abstract:
A semiconductor structure including: trench-defining layer; an epitaxial layer; and a set of defect-blocking member(s). The trench-defining layer includes a trench surface which defines an elongated interior space called the “trench.” The epitaxial layer is grown epitaxially in the interior space of the trench. Each defect blocking member of the set of defect blocking members: (i) extends from a portion of trench surface into the interior space of the trench; and (ii) is located below a top surface of the epitaxial layer. The defect blocking member(s) are designed to arrest the propagation of generally-longitudinal defects in the epitaxial layer, as it is grown, where the generally-longitudinal defects are defects that propagate at least generally in the elongation direction of the trench.
Public/Granted literature
- US20160181359A1 ZIG-ZAG TRENCH STRUCTURE TO PREVENT ASPECT RATIO TRAPPING DEFECT ESCAPE Public/Granted day:2016-06-23
Information query
IPC分类: