Invention Grant
- Patent Title: Method of manufacturing display device including a surface treatment operation to remove activated fluorine
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Application No.: US15076692Application Date: 2016-03-22
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Publication No.: US09601722B2Publication Date: 2017-03-21
- Inventor: Sunhye Lee , Wonjun Song , Myungjong Jung
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-Si, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-Si, Gyeonggi-Do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2015-0113452 20150811
- Main IPC: H01L51/56
- IPC: H01L51/56 ; H01L27/32

Abstract:
A method of manufacturing a display device, the method including providing a first electrode on a base substrate; providing a fluorine-containing pixel defining layer on the base substrate and the first electrode such that the pixel defining layer exposes at least a portion of the first electrode; pretreating the first electrode; and providing an organic layer on the first electrode after pretreating the first electrode, wherein pretreating the first electrode includes performing a first treatment operation of treating an exposed surface of the first electrode using a first plasma gas; and performing a second treatment operation after performing the first treatment operation, the second treatment operation including treating the exposed surface of the first electrode using a second plasma gas, wherein the second plasma gas is different from the first plasma gas and includes hydrogen.
Public/Granted literature
- US20170047556A1 METHOD OF MANUFACTURING DISPLAY DEVICE Public/Granted day:2017-02-16
Information query
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