Invention Grant
- Patent Title: Measuring probe for measuring the thickness of thin layers, and method for the production of a sensor element for the measuring probe
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Application No.: US14119953Application Date: 2012-05-24
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Publication No.: US09605940B2Publication Date: 2017-03-28
- Inventor: Helmut Fischer
- Applicant: Helmut Fischer
- Applicant Address: DE Sindelfingen
- Assignee: Helmut Fischer GbmH Institut für Elektronik und Messtechnik
- Current Assignee: Helmut Fischer GbmH Institut für Elektronik und Messtechnik
- Current Assignee Address: DE Sindelfingen
- Agency: Renner, Otto, Boisselle and Sklar LLP
- Priority: DE102011103122 20110525; DE102011103123 20110525
- International Application: PCT/EP2012/059691 WO 20120524
- International Announcement: WO2012/160132 WO 20121129
- Main IPC: G01B7/06
- IPC: G01B7/06

Abstract:
The invention relates to a measuring probe for measuring the thickness of thin layers with a housing, having at least one sensor element, which is received in the housing at least slightly moveably along a longitudinal axis and which comprises at least one winding device, which is allocated to the longitudinal axis, having a spherical positioning cap facing the outer front face of the housing, said cap being arranged in the longitudinal axis, wherein the spherical positioning cap has a basic body that has a cylindrical core section and a pole cap arranged on a front face of the core section, wherein the winding device is allocated to the spherical positioning cap, said winding device being formed from a discoidal or annular carrier with at least one Archimedean coil arranged thereon and with the basic body consisting of a ferritic material and the pole cap consisting of a hard metal.
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