- 专利标题： Pre space transformer, space transformer manufactured using the pre space transformer, and semiconductor device inspecting apparatus including the space transformer
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申请号： US14029684申请日： 2013-09-17
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公开(公告)号： US09607754B2公开(公告)日： 2017-03-28
- 发明人: Yoon Hyuck Choi , Kwang Jae Oh , Ki Young Kim
- 申请人： Samsung Electro-Mechanics Co., Ltd.
- 申请人地址： KR Seongnam-si, Gyeonggi-Do
- 专利权人： SEMCNS CO., LTD
- 当前专利权人： SEMCNS CO., LTD
- 当前专利权人地址： KR Seongnam-si, Gyeonggi-Do
- 代理机构： McDermott Will & Emery LLP
- 优先权： KR10-2012-0150877 20121221
- 主分类号： H01F27/29
- IPC分类号： H01F27/29 ; G01R31/26 ; G01R1/073
摘要：
Disclosed herein is a pre space transformer including: a substrate having a first surface and a second surface, which is an opposite surface to the first surface; individual electrodes disposed on the first surface; and common electrodes disposed in the substrate, wherein the individual electrodes are repeatedly disposed while configuring a unit pattern.
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